워크 검색 동작 순서와 트러블슈팅

Prepare the necessary equipment for wafer-search

Necessary equipment:: Instruction manual of robot; Personal computer; RS232C serial communication cable; Teaching box; Cassettes and wafers as many as the number of cassette slots

Place wafers to all the slots in the cassette and set them to the position where wafer-search is started.
Next, set the parameters necessary for wafer-search. Set them as the following procedures.

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