Wafer-Search Operation Procedure and Troubleshooting
11: Reading out of wafer-search results
- After executing wafer-search, read out the results of wafer-search.
- Read out the results of wafer-search via serial communication. Input the following commands for configuration:
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- This operation reads out the results of wafer-search.
- The response from the controller is as follows:
- Response
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～
- Return value and Search results
- Read out the data equivalent to the number of cassette slots (“3: Setting of the number of cassette slots (WFC setting)”) and the following status is displayed:
- 0: No wafers detected
- 1: Wafers detected
- W: Thickness error
- E: Cross-slotted
- *The contents of status display varies depending on specifications. Please refer to the instruction manual.
- For example) To output “robot $1, 25 slots of the cassette with wafers placed in all slots, neither cross-slotted nor thickness errors", the following status will be displayed.
- >＄11，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1，1
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