워크 검색 동작 순서와 트러블슈팅
10: Execution of wafer-search
- Before executing the start position of wafer-search, make sure that the robot is in the start position of wafer-search.
- Execute wafer-search via serial communication. Input the following commands for configuration:
- This operation turns on the wafer detection sensor which executes wafer-search.
- This operation executes the performance of wafer detection only.
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