워크 검색 동작 순서와 트러블슈팅

9: Teaching and setting of the start position of wafer-search

[1] Teach the robot the start position of wafer-search.

[2] Set the point of the start position of wafer-search.

The start position of wafer-search should be set to the position lower than 3 mm of the first slot of the cassette (WLO).

*The procedure varies depending on cassette or wafer types.

Note 1: When the start position of wafer-search is too close to the first slot, it may fall within the range of “6: Setting of the detection gate width of wafer (WWG setting)” and it may cause an error in wafer-search of the lowest slot.

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