워크 검색 동작 순서와 트러블슈팅
8: Setting of the speed of wafer-search (WSP setting)
- *WSP command may not be used depending on specifications.
- Set the speed of wafer-search.
- Setting unit is 4-digit decimal number, same as “OH” described in the explanation of each parameter/speed settings.
- Set the speed of wafer-search via serial communication. Input the following commands for configuration:
-
Input the speed of wafer search in "DEC". 
Obtain the current designated data
Data to be set- *When the speed of wafer-search is fast, the results of wafer-search may not be detected correctly.
- *When the speed of wafer-search becomes faster, the detection width tends to be smaller than the actual wafer width.
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This completes the procedures for the parameter settings required for wafer-search.
All the designated data is to be memorized in EEPROM with the commands “AW” and “DW”.
Proceed to the actual execution of wafer-search.
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